Micromachines (Mar 2020)

An In-Line Fiber Optic Fabry–Perot Sensor for High-Temperature Vibration Measurement

  • Dong Chen,
  • Jiang Qian,
  • Jia Liu,
  • Baojie Chen,
  • Guowen An,
  • Yingping Hong,
  • Pinggang Jia,
  • Jijun Xiong

DOI
https://doi.org/10.3390/mi11030252
Journal volume & issue
Vol. 11, no. 3
p. 252

Abstract

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An in-line fiber optic Fabry−Perot (FP) sensor for high-temperature vibration measurement is proposed and experimentally demonstrated in this paper. We constructed an FP cavity and a mass on single-mode fibers (SMFs) by fusion, and together they were inserted into a hollow silica glass tube (HST) to form a vibration sensor. The radial dimension of the sensor was less than 500 μm. With its all-silica structure, the sensor has the prospect of measuring vibration in high-temperature environments. In our test, the sensor had a resonance frequency of 165 Hz. The voltage sensitivity of the sensor system was about 11.57 mV/g and the nonlinearity was about 2.06%. The sensor could work normally when the temperature was below 500 °C, and the drift of the phase offset point with temperature was 0.84 pm/°C.

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