Photonics (Nov 2021)

In-Situ Depth Measurement of Laser Micromachining

  • Xiaoming Chen,
  • Ying Xu,
  • Nan-Kuang Chen,
  • Shannon Shy,
  • Hsiang-Chen Chui

DOI
https://doi.org/10.3390/photonics8110493
Journal volume & issue
Vol. 8, no. 11
p. 493

Abstract

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Precision laser micromachining plays an important role in the biomedical, electronics, and material processing industries. During laser drilling, precision depth detection with micrometer-level resolution is required, particularly with blind-hole or heterogeneous structures. We present an optical detection system utilizing an optical confocal structure, experimentally confirmed to achieve a >95% accuracy for micron-diameter holes that are tens-of-microns deep. This system can be easily integrated into commercial laser micromachining processes, and can be employed in laser drilling and three-dimensional active-feedback laser printing.

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