ACS Omega (Apr 2021)

Stability Evaluation of Candidate Precursors for Chemical Vapor Deposition of Hafnium Diboride (HfB2)

  • Jessica M. Rimsza,
  • Samuel C. B. Chackerian,
  • Timothy J. Boyle,
  • Bernadette A. Hernandez-Sanchez

DOI
https://doi.org/10.1021/acsomega.1c00391
Journal volume & issue
Vol. 6, no. 17
pp. 11404 – 11410

Abstract

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