Investigation of New Accelerometer Based on Capacitive Micromachined Ultrasonic Transducer (CMUT) with Ring-Perforation Membrane

Luhao Gou; Hongliang Wang; Qi Ding; Yulong Liu; Runze Yang; Feng Zhang; Pengcheng Zhang; Gang Cao

doi:10.3390/mi15020279

Micromachines (Feb 2024)

Investigation of New Accelerometer Based on Capacitive Micromachined Ultrasonic Transducer (CMUT) with Ring-Perforation Membrane

Luhao Gou,
Hongliang Wang,
Qi Ding,
Yulong Liu,
Runze Yang,
Feng Zhang,
Pengcheng Zhang,
Gang Cao

Affiliations

Luhao Gou: National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China
Hongliang Wang: National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China
Qi Ding: National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China
Yulong Liu: National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China
Runze Yang: National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China
Feng Zhang: National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China
Pengcheng Zhang: National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China
Gang Cao: National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China

DOI: https://doi.org/10.3390/mi15020279
Journal volume & issue: Vol. 15, no. 2
p. 279

Abstract

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Capacitive micromachined ultrasonic transducer (CMUT) has been widely studied due to its excellent resonance characteristics and array integration. This paper presents the first study of the CMUT electrostatic stiffness resonant accelerometer. To improve the sensitivity of the CMUT accelerometer, this paper innovatively proposes the CMUT ring-perforation membrane structure, which effectively improves the acceleration sensitivity by reducing the mechanical stiffness of the elastic membrane. The acceleration sensitivity is 10.9 (Hz/g) in the acceleration range of 0–20 g, which is 100% higher than that of the conventional CMUT structure. This research contributes to the acceleration measurement field of CMUT and can effectively contribute to the breakthrough of vibration acceleration monitoring technology in aerospace, medical equipment, and automotive electronics.

Published in Micromachines

ISSN: 2072-666X (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Mechanical engineering and machinery
Website: https://www.mdpi.com/journal/micromachines

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