Tb _x -Zn _1-x -BDC MOF films were deposited in situ on glass substrates using the aerosol-assisted chemical vapor deposition (AACVD) technique with an ultrasonic spray pyrolysis system, with x ranging from 0 to 1. Various precursors and solvents were used in the precursor solutions, which were precisely nebulized onto the substrate. The resulting films were characterized using techniques such as x-ray diffraction, Raman spectroscopy, Fourier Transform Infrared Spectroscopy (FTIR), and Photoluminescence Spectroscopy. The findings revealed the evolution of Zn-BDC and/or Tb-BDC crystalline structures within the films and changes in the physical properties of the Metal Organic Frameworks (MOFs), such as film thickness and roughness. Moreover, these insights offer vital information for the design and control of MOF films with specific properties, highlighting their potential applications in various fields.
