Research progress in TiO₂ thin film gas sensor

Abstract

TiO2 nano-film type gas sensor has the advantages of simple preparation method, high sensitivity, good consistency and miniaturization, and the wide band of TiO2 semiconductor enables it to greatly improve the performance of the sensor by coating other elements. Nowadays, it has received more and more attention from researchers. In this paper, the research progress of TiO2 gas sensor at home and abroad was reviewed. The application of TiO2 thin film gas sensor in the detection of six common reducing gases(H2, NH3, H2S, VOC, CO, SO2) and two common oxidizing gases(CO2 and NOx) was introduced. In the application of gas detection, the sensing performance and sensing mechanism were discussed and the future research and development of TiO2 thin film gas sensor were prospected such as doping conductive particles, precious metals or metal oxides into TiO2 to improve its performance, which provides a reference for the study of new gas sensor.

Keywords

• tio₂
• nano-film type
• gas sensor
• sensing performance
• sensing mechanism