Microsystems & Nanoengineering (Feb 2022)

High-speed identification of suspended carbon nanotubes using Raman spectroscopy and deep learning

  • Jian Zhang,
  • Mickael L. Perrin,
  • Luis Barba,
  • Jan Overbeck,
  • Seoho Jung,
  • Brock Grassy,
  • Aryan Agal,
  • Rico Muff,
  • Rolf Brönnimann,
  • Miroslav Haluska,
  • Cosmin Roman,
  • Christofer Hierold,
  • Martin Jaggi,
  • Michel Calame

DOI
https://doi.org/10.1038/s41378-022-00350-w
Journal volume & issue
Vol. 8, no. 1
pp. 1 – 9

Abstract

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Abstract The identification of nanomaterials with the properties required for energy-efficient electronic systems is usually a tedious human task. A workflow to rapidly localize and characterize nanomaterials at the various stages of their integration into large-scale fabrication processes is essential for quality control and, ultimately, their industrial adoption. In this work, we develop a high-throughput approach to rapidly identify suspended carbon nanotubes (CNTs) by using high-speed Raman imaging and deep learning analysis. Even for Raman spectra with extremely low signal-to-noise ratios (SNRs) of 0.9, we achieve a classification accuracy that exceeds 90%, while it reaches 98% for an SNR of 2.2. By applying a threshold on the output of the softmax layer of an optimized convolutional neural network (CNN), we further increase the accuracy of the classification. Moreover, we propose an optimized Raman scanning strategy to minimize the acquisition time while simultaneously identifying the position, amount, and metallicity of CNTs on each sample. Our approach can readily be extended to other types of nanomaterials and has the potential to be integrated into a production line to monitor the quality and properties of nanomaterials during fabrication.