Squared PMUT with Enhanced Pressure Sensitivities

Abstract

This study presents a squared AlN piezoelectric micromachined ultrasonic transducer (PMUT). Using this PMUT greater level of output pressure and higher reception sensitivity has been achieved, compared with the state-of-the-art. Another outstanding characteristic for this PMUT is that it can be monolithically integrated on CMOS substrate, being remarkably advantageous in relation to the bonding method implemented until now.

Keywords

• piezoelectric micromachined ultrasonic transducer (PMUT)
• differential excitation
• transmitting sensitivity
• receiving sensitivity