Microsphere-Based Microsensor for Miniature Motors’ Vibration Measurement
Kaichuan Xu,
Chunlei Jiang,
Qilu Ban,
Pan Dai,
Yaqiang Fan,
Shijie Yang,
Yue Zhang,
Jiacheng Wang,
Yu Wang,
Xiangfei Chen,
Jie Zeng,
Feng Wang
Affiliations
Kaichuan Xu
Key Laboratory of Intelligent Optical Sensing and Manipulation of the Ministry of Education, National Laboratory of Solid State Microstructures, Engineering Research Center of Precision Photonics Integration and System Application of the Ministry of Education, College of Engineering and Applied Sciences, Institute of Optical Communication Engineering, Nanjing University-Tongding Joint Lab for Large-Scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China
Chunlei Jiang
College of Electrical and Information Engineering, Northeast Petroleum University, Daqing 163318, China
Qilu Ban
Key Laboratory of Intelligent Optical Sensing and Manipulation of the Ministry of Education, National Laboratory of Solid State Microstructures, Engineering Research Center of Precision Photonics Integration and System Application of the Ministry of Education, College of Engineering and Applied Sciences, Institute of Optical Communication Engineering, Nanjing University-Tongding Joint Lab for Large-Scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China
Pan Dai
Key Laboratory of Intelligent Optical Sensing and Manipulation of the Ministry of Education, National Laboratory of Solid State Microstructures, Engineering Research Center of Precision Photonics Integration and System Application of the Ministry of Education, College of Engineering and Applied Sciences, Institute of Optical Communication Engineering, Nanjing University-Tongding Joint Lab for Large-Scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China
Yaqiang Fan
Key Laboratory of Intelligent Optical Sensing and Manipulation of the Ministry of Education, National Laboratory of Solid State Microstructures, Engineering Research Center of Precision Photonics Integration and System Application of the Ministry of Education, College of Engineering and Applied Sciences, Institute of Optical Communication Engineering, Nanjing University-Tongding Joint Lab for Large-Scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China
Shijie Yang
Key Laboratory of Intelligent Optical Sensing and Manipulation of the Ministry of Education, National Laboratory of Solid State Microstructures, Engineering Research Center of Precision Photonics Integration and System Application of the Ministry of Education, College of Engineering and Applied Sciences, Institute of Optical Communication Engineering, Nanjing University-Tongding Joint Lab for Large-Scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China
Yue Zhang
Key Laboratory of Intelligent Optical Sensing and Manipulation of the Ministry of Education, National Laboratory of Solid State Microstructures, Engineering Research Center of Precision Photonics Integration and System Application of the Ministry of Education, College of Engineering and Applied Sciences, Institute of Optical Communication Engineering, Nanjing University-Tongding Joint Lab for Large-Scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China
Jiacheng Wang
Key Laboratory of Intelligent Optical Sensing and Manipulation of the Ministry of Education, National Laboratory of Solid State Microstructures, Engineering Research Center of Precision Photonics Integration and System Application of the Ministry of Education, College of Engineering and Applied Sciences, Institute of Optical Communication Engineering, Nanjing University-Tongding Joint Lab for Large-Scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China
Yu Wang
Key Laboratory of Intelligent Optical Sensing and Manipulation of the Ministry of Education, National Laboratory of Solid State Microstructures, Engineering Research Center of Precision Photonics Integration and System Application of the Ministry of Education, College of Engineering and Applied Sciences, Institute of Optical Communication Engineering, Nanjing University-Tongding Joint Lab for Large-Scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China
Xiangfei Chen
Key Laboratory of Intelligent Optical Sensing and Manipulation of the Ministry of Education, National Laboratory of Solid State Microstructures, Engineering Research Center of Precision Photonics Integration and System Application of the Ministry of Education, College of Engineering and Applied Sciences, Institute of Optical Communication Engineering, Nanjing University-Tongding Joint Lab for Large-Scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China
Jie Zeng
State Key Laboratory of Mechanics and Control for Aerospace Structures, Nanjing University of Aeronautics and Astronautics, No. 29 Yudao Street, Nanjing 210016, China
Feng Wang
Key Laboratory of Intelligent Optical Sensing and Manipulation of the Ministry of Education, National Laboratory of Solid State Microstructures, Engineering Research Center of Precision Photonics Integration and System Application of the Ministry of Education, College of Engineering and Applied Sciences, Institute of Optical Communication Engineering, Nanjing University-Tongding Joint Lab for Large-Scale Photonic Integrated Circuits, Nanjing University, Nanjing 210023, China
We present a microsphere-based microsensor that can measure the vibrations of the miniature motor shaft (MMS) in a small space. The microsensor is composed of a stretched fiber and a microsphere with a diameter of 5 μm. When a light source is incident on the microsphere surface, the microsphere induces the phenomenon of photonic nanojet (PNJ), which causes light to pass through the front. The PNJ’s full width at half maximum is narrow, surpassing the diffraction limit, enables precise focusing on the MMS surface, and enhances the scattered or reflected light emitted from the MMS surface. With two of the proposed microsensors, the axial and radial vibration of the MMS are measured simultaneously. The performance of the microsensor has been calibrated with a standard vibration source, demonstrating measurement errors of less than 1.5%. The microsensor is expected to be used in a confined space for the vibration measurement of miniature motors in industry.
