Ultra-high precision CMMs and their associated tactile or/and optical scanning probes

Abstract

Optical and tactile single scanning probes usually are used in dimensional metrology applications, especially for roughness, form, thickness and surface profile measurements. To perform assessments with nanometre level of accuracy, specific ultra-high precision machines have been developed by the National Metrology Institutes (NMIs) such as the LNE, VSL, METAS, SMD, generally in collaboration with industrials and academics partners. Such developments are not devoted only to NMIs but many industrials develop and commercialize their own ultra-high precision machines as the IBSPE and TNO companies. All these machines provide optical and tactile precise measurements and cover a large domain of application such as the form’s characterization of optical lenses. In this paper the performance and capability of ultra-high precision machines of some National Metrology Institutes (LNE, VSL, SMD and METAS) and industrials companies (TNO and IBSPE), involving together in the IND10 European EMRP project titled “Optical and tactile metrology for absolute form characterization”, will be detailed. Theirs probing systems and accuracies levels will be evoked. Relevant results especially for measuring optical lenses will be also presented and discussed.

Keywords

• Measuring machine
• chromatic confocal probe
• tactile probe
• error sources
• dimensional and mechanical metrology
• evaluation