Aging Processes in Implanted Fluorine Ions and Laser Irradiated Films of LaGa:YIG

Abstract

Based on the results of X-ray structural analysis, changes in the crystalline structure during natural aging and laser annealing, which occurred in near-surface layers of epitaxial films of LaGa-substituted Iron-Yttrium Garnet, implanted by F+ ions, were studied. The processes that occur during the ion implantation by F+ in ferrite-garnet films, and the processes that accompany the low-temperature aging of ion-implanted films are considered. From the experimental rocking curves, obtained immediately after ion implantation, after the laser irradiation and after several years, strain profiles were determined. Two stages in the changes of the crystalline structure of the near-surface disturbed layer over time are revealed. During the first of them, the maximum deformation in the ion-implanted layer increased slightly, and on the second it decreased. It was established that the results of laser annealing and natural aging of near-surface layers implanted by F+ ions and laser irradiated LaGa:YIG films depend on the direction from which laser irradiation occurred. However, the result of their total exposure does not depend on the side of laser irradiation.

Keywords

• природне старіння
• профіль деформації
• х-променева дифрактометрія
• іонна імплантація
• лазерне опромінення
• дефекти структури