Characterization of a Capacitive Sensor for Particulate Matter

Abstract

We characterize a novel micro-sensor with pairs of interdigitated combs of microelectrodes designed to detect particles in air. We evaluate the sensor’s response to 1 µm Polystyrene Latex (PSL) particles experimentally and crosscheck the results with simulations. Experiment and simulation show good consistency. Based on the promising results we propose a redesign of the capacitive particle sensor with respect to PM2.5.

Keywords

• particle sensor
• capacitive sensing
• particle deposition