Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications
Zhuoyue Zheng,
Chen Wang,
Linlin Wang,
Zeyu Ji,
Xiaoxiao Song,
Pui-In Mak,
Huafeng Liu,
Yuan Wang
Affiliations
Zhuoyue Zheng
Institute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau 999078, China
Chen Wang
Department of Electrical Engineering-MNS, University of Leuven, 3000 Leuven, Belgium
Linlin Wang
Department of Electrical Engineering-MNS, University of Leuven, 3000 Leuven, Belgium
Zeyu Ji
Institute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau 999078, China
Xiaoxiao Song
School of Physics and Information Engineering, Jiangsu Second Normal University, Nanjing 210013, China
Pui-In Mak
Institute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau 999078, China
Huafeng Liu
MOE Key Laboratory of Fundamental Physical Quantities Measurement, PGMF and School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China
Yuan Wang
Institute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau 999078, China
The MEMS microphone is a representative device among the MEMS family, which has attracted substantial research interest, and those tailored for human voice have earned distinct success in commercialization. Although sustained development persists, challenges such as residual stress, environmental noise, and structural innovation are posed. To collect and summarize the recent advances in this subject, this paper presents a concise review concerning the transduction mechanism, diverse mechanical structure topologies, and effective methods of noise reduction for high-performance MEMS microphones with a dynamic range akin to the audible spectrum, aiming to provide a comprehensive and adequate analysis of this scope.
