Mechanical Impedance Analysis of a Novel MEMS Photon Force Sensor

Abstract

In this work we present how to describe mechanical impedance of a photon force (PF) MEMS sensor dedicated to structures’ optomechanical studies. An actuating force (photon force) is caused by the reflection and absorption of the electromagnetic radiation beam due to the radiation pressure effect. Specially designed very soft (low k-constant, ca 10–150 mN/m) cantilevers are presented. The structures integrate a Lorentz loop, which enables electromagnetic actuation. The construction with two mirrors is proposed so that parasitic thermal actuation can be neglected. The MEMS displacement is measured with the use of a laser vibrometer. The mechanical impedance model is presented using which the stiffness is calculated. As validation measurements: thermal noise and known mass adding methods are used.

Keywords

• photon-force MEMS
• mechanical impedance
• dumped harmonic oscillator