BIO Web of Conferences (Jan 2024)

Strain mapping and simulation of transistor structures in a 22nm FDSOI technology

  • Utess Dirk,
  • Kleimaier Dominik Martin,
  • Billan Etienne,
  • Youssuf Tashfain,
  • Zhao Zhixing,
  • Nemec Thorgund,
  • Meyer Moritz Andreas,
  • Rinderknecht Jochen

DOI
https://doi.org/10.1051/bioconf/202412924030
Journal volume & issue
Vol. 129
p. 24030

Abstract

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Keywords