Application of the method of self-extending high-temperature synthesis for receiving porous vacuum inserts of faceplates of electronic mechanical engineering equipment

Abstract

There are given the results of research the process of receiving by method of self-extending high-temperature synthesis of porous vacuum inserts of the faceplates used by production of semiconductor silicon plates at the enterprises of electronic mechanical engineering.

Keywords

• semiconductor silicon plates
• powder metallurgy
• self-extending high-temperature synthesis
• oxynitride of the titan