A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections
JiuJiang Wang,
Xin Liu,
YuanYu Yu,
Yao Li,
ChingHsiang Cheng,
Shuang Zhang,
PengUn Mak,
MangI Vai,
SioHang Pun
Affiliations
JiuJiang Wang
College of Computer Science and AI, Neijiang Normal University, Neijiang 641100, China
Xin Liu
State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau 999078, China
YuanYu Yu
College of Computer Science and AI, Neijiang Normal University, Neijiang 641100, China
Yao Li
College of Computer Science and AI, Neijiang Normal University, Neijiang 641100, China
ChingHsiang Cheng
School of Automotive Engineering, Wuhan University of Technology, Wuhan 430070, China
Shuang Zhang
College of Computer Science and AI, Neijiang Normal University, Neijiang 641100, China
PengUn Mak
Department of Electrical and Computer Engineering, Faculty of Science and Technology, University of Macau, Macau 999078, China
MangI Vai
State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau 999078, China
SioHang Pun
State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau 999078, China
Analytical modeling of capacitive micromachined ultrasonic transducer (CMUT) is one of the commonly used modeling methods and has the advantages of intuitive understanding of the physics of CMUTs and convergent when modeling of collapse mode CMUT. This review article summarizes analytical modeling of the collapse voltage and shows that the collapse voltage of a CMUT correlates with the effective gap height and the electrode area. There are analytical expressions for the collapse voltage. Modeling of the membrane deflections are characterized by governing equations from Timoshenko, von Kármán equations and the 2D plate equation, and solved by various methods such as Galerkin’s method and perturbation method. Analytical expressions from Timoshenko’s equation can be used for small deflections, while analytical expression from von Kármán equations can be used for both small and large deflections.
