Etched p-Type Si Nanowires for Efficient Ozone Decomposition

Abstract

Abstract High concentration ozone can damage greatly to the respiratory, cardiovascular systems, and fertility of people, and catalytic decomposition is an important strategy to reduce its harm. However, it remains a challenge to develop efficient ozone decomposition catalysts with high efficiency. In this study, p- and n-type silicon nanowires (Si NWs) are fabricated by wet chemical etching method and are firstly applied to catalytic decompose ozone at room temperature. The p-type Si NWs exhibit 90% ozone (20 ppm O3/air) decomposition efficiency with great stability, which is much better than that of n-type Si NWs (50%) with same crystal orientation, similar diameter and specific surface area. The catalytic property difference is mainly attributed to the more delocalization holes in the p-type Si NWs, which can accelerate the desorption of ozone decomposition intermediates (i.e., adsorbed oxygen species).

Keywords

• Ozone decomposition
• Metal-assisted chemical
• etching method
• Si nanowires
• p-type