Enhancing Performance of a MEMS-Based Piezoresistive Pressure Sensor by Groove: Investigation of Groove Design Using Finite Element Method
Phongsakorn Thawornsathit,
Ekachai Juntasaro,
Hwanjit Rattanasonti,
Putapon Pengpad,
Karoon Saejok,
Chana Leepattarapongpan,
Ekalak Chaowicharat,
Wutthinan Jeamsaksiri
Affiliations
Phongsakorn Thawornsathit
Mechanical Engineering Simulation and Design Group, The Sirindhorn International Thai-German Graduate School of Engineering (TGGS), King Mongkut’s University of Technology North Bangkok, Bangsue, Bangkok 10800, Thailand
Ekachai Juntasaro
Mechanical Engineering Simulation and Design Group, The Sirindhorn International Thai-German Graduate School of Engineering (TGGS), King Mongkut’s University of Technology North Bangkok, Bangsue, Bangkok 10800, Thailand
Hwanjit Rattanasonti
Thai Microelectronics Center (TMEC), National Electronics and Computer Technology Center, National Science and Technology Development Agency, 24000 Chachoengsao, Thailand
Putapon Pengpad
Thai Microelectronics Center (TMEC), National Electronics and Computer Technology Center, National Science and Technology Development Agency, 24000 Chachoengsao, Thailand
Karoon Saejok
Thai Microelectronics Center (TMEC), National Electronics and Computer Technology Center, National Science and Technology Development Agency, 24000 Chachoengsao, Thailand
Chana Leepattarapongpan
Thai Microelectronics Center (TMEC), National Electronics and Computer Technology Center, National Science and Technology Development Agency, 24000 Chachoengsao, Thailand
Ekalak Chaowicharat
Thai Microelectronics Center (TMEC), National Electronics and Computer Technology Center, National Science and Technology Development Agency, 24000 Chachoengsao, Thailand
Wutthinan Jeamsaksiri
Thai Microelectronics Center (TMEC), National Electronics and Computer Technology Center, National Science and Technology Development Agency, 24000 Chachoengsao, Thailand
The optimal groove design of a MEMS piezoresistive pressure sensor for ultra-low pressure measurement is proposed in this work. Two designs of the local groove and one design of the annular groove are investigated. The sensitivity and linearity of the sensor are investigated due to the variations of two dimensionless geometric parameters of these grooves. The finite element method is used to determine the stress and deflection of the diaphragm in order to find the sensor performances. The sensor performances can be enhanced by creating the annular or local groove on the diaphragm with the optimal dimensionless groove depth and length. In contrast, the performances are diminished when the local groove is created on the beam at the piezoresistor. The sensitivity can be increased by increasing the dimensionless groove length and depth. However, to maintain low nonlinearity error, the annular and local grooves should be created on the top of the diaphragm. With the optimal designs of annular and local grooves, the net volume of the annular groove is four times greater than that of the local groove. Finally, the functional forms of the stress and deflection of the diaphragm are constructed for both annular and local groove cases.
