Proceedings
(Dec 2018)
Gas-Flow Sensor Based on Self-Oscillating and Self-Sensing Cantilever
Jens-Peter Zöllner,
Steve Durstewitz,
Jaqueline Stauffenberg,
Tzvetan Ivanov,
Mathias Holz,
Waleed Ehrhardt,
W.-Ulrich Riegel,
Ivo W. Rangelow
Affiliations
Jens-Peter Zöllner
Department of Micro- and Nanoelectronic Systems, Ilmenau University of Technology, Gustav-Kirchhoff-Str.1, 98693 Ilmenau, Germany
Steve Durstewitz
Department of Micro- and Nanoelectronic Systems, Ilmenau University of Technology, Gustav-Kirchhoff-Str.1, 98693 Ilmenau, Germany
Jaqueline Stauffenberg
Department of Micro- and Nanoelectronic Systems, Ilmenau University of Technology, Gustav-Kirchhoff-Str.1, 98693 Ilmenau, Germany
Tzvetan Ivanov
Department of Micro- and Nanoelectronic Systems, Ilmenau University of Technology, Gustav-Kirchhoff-Str.1, 98693 Ilmenau, Germany
Mathias Holz
Department of Micro- and Nanoelectronic Systems, Ilmenau University of Technology, Gustav-Kirchhoff-Str.1, 98693 Ilmenau, Germany
Waleed Ehrhardt
Electronic & Sensors, Am Vogelherd 10 (Tor 1), 98693 Ilmenau, Germany
W.-Ulrich Riegel
ETG Entwicklungs-und Technologie Gesellschaft mbH, Am Eichicht 1 A, 98693 Ilmenau, Germany
Ivo W. Rangelow
Department of Micro- and Nanoelectronic Systems, Ilmenau University of Technology, Gustav-Kirchhoff-Str.1, 98693 Ilmenau, Germany
DOI
https://doi.org/10.3390/proceedings2130846
Journal volume & issue
Vol. 2,
no. 13
Abstract
Read online
In this work the application of a self-sensing and self-actuating cantilever for gas-flow measurement is investigated. The cantilever placed in the flow is excited permanently at its first resonance mode. Simultaneously the resonance amplitude, the resonance frequency and the static bending of the cantilever are detected. All three sizes are related to the velocity of the gas-flow.
Keywords
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