Overview of the technologies used in the fabrication of MEMS/NEMS actuators for space applications

Abstract

Given the advantages in terms of weight, size and cost and because it can withstand severe shocks and temperature changes, the MEMS/NEMS sensors are widely used in the aerospace domain. This paper presents a brief history of the scientists who made reference to micro and nano technologies for the first time, followed by a synthesis of the leading technologies used in the manufacture of microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) intensively used in aerospace industry. After reviewing the latest technologies used in the manufacture of MEMS/NEMS sensors, the paper continues with predicting the current state regarding the development of NEMS and MEMS, respectively.

Keywords

• nanoparticles
• microtechnology
• multilayer structures
• microelectronic systems
• nanoelectromechanical systems
• gyroscopes