Aerosol/Ink Jet Printing Technology for High-Temperature MEMS Sensors

Abstract

In this work we present the results on the application of additive technology that is aerosol and ink jet technique for the fabrication of high-temperature metal oxide gas sensors. The application of thin (12 μm) alumina membrane, aerosol jet printing of Pt microheater (line width 40–60 μm), printed sensing layer made of nanocristalline tin dioxide based material, laser cutting of the membrane enabled the fabrication of full-printed cantilever-shaped high-temperature sensor with optimal power consumption (~80 mW at 450 °C) applicable in wireless instruments for the detection of combustible and toxic gases including methane.

Keywords

• additive technology
• aerosol and ink jet printing
• high-temperature full printed sensor
• metal oxide sensors
• thermocatalytical sensor