Comparison of NH<sub>3</sub> and N<sub>2</sub>O Plasma Treatments on Bi<sub>2</sub>O<sub>3</sub> Sensing Membranes Applied in an Electrolyte–Insulator–Semiconductor Structure
Chyuan-Haur Kao,
Kuan-Lin Chen,
Yi-Shiang Chiu,
Lin Sang Hao,
Shih-Ming Chen,
Ming-Hsien Li,
Ming-Ling Lee,
Hsiang Chen
Affiliations
Chyuan-Haur Kao
Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan District, Taoyuan City 333, Taiwan
Kuan-Lin Chen
Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Road, Kwei-Shan District, Taoyuan City 333, Taiwan
Yi-Shiang Chiu
Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Puli, Nantou 545, Taiwan
Lin Sang Hao
Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Puli, Nantou 545, Taiwan
Shih-Ming Chen
Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Puli, Nantou 545, Taiwan
Ming-Hsien Li
Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Puli, Nantou 545, Taiwan
Ming-Ling Lee
Department of Electro-Optical Engineering, Minghsin University of Science and Technology, No. 1, Xinxing Road, Xinfeng, Hsinchu 30401, Taiwan
Hsiang Chen
Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Puli, Nantou 545, Taiwan
In this study, bismuth trioxide (Bi2O3) membranes in an electrolyte–insulator–semiconductor (EIS) structure were fabricated with pH sensing capability. To optimize the sensing performance, the membranes were treated with two types of plasma—NH3 and N2O. To investigate the material property improvements, multiple material characterizations were conducted. Material analysis results indicate that plasma treatments with appropriate time could enhance the crystallization, remove the silicate and facilitate crystallizations. Owing to the material optimizations, the pH sensing capability could be greatly boosted. NH3 or N2O plasma treated-Bi2O3 membranes could reach the pH sensitivity around 60 mV/pH and show promise for future biomedical applications.
