Modelling and FEM Simulation of Love Wave SAW-Based Dichloromethane Gas Sensor

Anchara Veettil Anoop; Bhargav Panchal; Soney Varghese

doi:10.3390/ecsa-9-13267

Engineering Proceedings (Nov 2022)

Modelling and FEM Simulation of Love Wave SAW-Based Dichloromethane Gas Sensor

Anchara Veettil Anoop,
Bhargav Panchal,
Soney Varghese

Affiliations

Anchara Veettil Anoop: Nanomaterials & Devices Research Laboratory, School of Materials Science and Engineering, National Institute of Technology, Calicut 673601, Kerala, India
Bhargav Panchal: Nanomaterials & Devices Research Laboratory, School of Materials Science and Engineering, National Institute of Technology, Calicut 673601, Kerala, India
Soney Varghese: Nanomaterials & Devices Research Laboratory, School of Materials Science and Engineering, National Institute of Technology, Calicut 673601, Kerala, India

DOI: https://doi.org/10.3390/ecsa-9-13267
Journal volume & issue: Vol. 27, no. 1
p. 27

Abstract

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In this paper, surface acoustic wave (SAW) technology based on love waves was designed in three dimensions for finite element modelling (FEM) and analysis in order to detect volatile organic compounds (VOC). A thin layer of polyisobutylene (PIB), which acted as the sensing layer, was placed on top of the guiding layer of SiO2 and interdigitated electrodes (IDE), which were modelled on a piezoelectric substrate. The substrate selected was 64° YZ-cut Lithium niobate (LiNbO3) for love wave generation, and the lightweight electrodes were made of Aluminium (Al). Analytical simulations were conducted using COMSOL Multiphysics 6.0 software.

Published in Engineering Proceedings

ISSN: 2673-4591 (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Engineering (General). Civil engineering (General): Engineering machinery, tools, and implements
Website: https://www.mdpi.com/journal/engproc

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