EPJ Web of Conferences (Jun 2010)

Temperature effects on the mechanical reliability of MEMS structures: experimental study on creep and thermal fatigue

  • Brusa E.,
  • Somà A.,
  • De Pasquale G.

DOI
https://doi.org/10.1051/epjconf/20100606001
Journal volume & issue
Vol. 6
p. 06001

Abstract

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