EPJ Web of Conferences (Jan 2023)

Nanoimprinting for all-polymer electro-optic waveguide devices

  • Henrique Franciele,
  • Maeder Andreas,
  • Talts Ülle-Linda,
  • Finco Giovanni,
  • Pohl David,
  • Kaufmann Fabian,
  • Reig Escalé Marc,
  • Elder Delwin,
  • Dalton Larry,
  • Grange Rachel

DOI
https://doi.org/10.1051/epjconf/202328704035
Journal volume & issue
Vol. 287
p. 04035

Abstract

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We performed the design and fabrication of polymer waveguide circuits, aiming for applications as electro-optic devices. Uniform waveguides with over one centimeter of length were fabricated by soft nanoimprint lithography. These multimode waveguides present a height of 3 µm and low surface roughness (2 nm), with a thin residual layer of 600 nm. Propagation losses at 1550 nm are estimated to be around 7 dB/cm.