LED ULTRAVIOLET EXPOSURE UNIT WITH ADJUSTABLE EXPOSURE TIME

A. E. Cheliapin; P. S. Begunov; Y. V. Trofimov; G. K. Zhavnerko

doi:10.35596/1729-7648-2019-125-7-46-50

Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki (Dec 2019)

LED ULTRAVIOLET EXPOSURE UNIT WITH ADJUSTABLE EXPOSURE TIME

A. E. Cheliapin,
P. S. Begunov,
Y. V. Trofimov,
G. K. Zhavnerko

Affiliations

A. E. Cheliapin: Center of LED and Optoelectronic Technologies of National Academy of Sciences of Belarus
P. S. Begunov: Center of LED and Optoelectronic Technologies of National Academy of Sciences of Belarus
Y. V. Trofimov: Center of LED and Optoelectronic Technologies of National Academy of Sciences of Belarus
G. K. Zhavnerko: IZOVAC Technologies, Ltd.

DOI: https://doi.org/10.35596/1729-7648-2019-125-7-46-50
Journal volume & issue: Vol. 0, no. 7 (125)
pp. 46 – 50

Abstract

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The possibilities of improving the quality of the topological pattern in the exposure of thick-film photoresists due to uniform irradiation with ultraviolet light-emitting diodes are investigated. The results of an experimental study of the developed LED ultraviolet photolithographic irradiator with a controlled exposure time are presented.

Published in Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki

ISSN: 1729-7648 (Print)
Publisher: Educational institution «Belarusian State University of Informatics and Radioelectronics»
Country of publisher: Belarus
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering: Electronics
Website: https://doklady.bsuir.by/

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Abstract

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