A Piezoelectric and Electromagnetic Dual Mechanism Multimodal Linear Actuator for Generating Macro- and Nanomotion
Xiangyu Gao,
Zhanmiao Li,
Jingen Wu,
Xudong Xin,
Xinyi Shen,
Xiaoting Yuan,
Jikun Yang,
Zhaoqiang Chu,
Shuxiang Dong
Affiliations
Xiangyu Gao
Department of Materials Science & Engineering, College of Engineering, Peking University, Beijing 100871, China
Zhanmiao Li
Department of Materials Science & Engineering, College of Engineering, Peking University, Beijing 100871, China
Jingen Wu
Department of Materials Science & Engineering, College of Engineering, Peking University, Beijing 100871, China
Xudong Xin
Department of Materials Science & Engineering, College of Engineering, Peking University, Beijing 100871, China
Xinyi Shen
Department of Materials Science & Engineering, College of Engineering, Peking University, Beijing 100871, China
Xiaoting Yuan
Department of Materials Science & Engineering, College of Engineering, Peking University, Beijing 100871, China
Jikun Yang
Department of Materials Science & Engineering, College of Engineering, Peking University, Beijing 100871, China
Zhaoqiang Chu
Department of Materials Science & Engineering, College of Engineering, Peking University, Beijing 100871, China
Shuxiang Dong
Department of Materials Science & Engineering, College of Engineering, Peking University, Beijing 100871, China; Beijing Key Laboratory for Magnetoeletric Materials and Devices, Beijing 100871, China
Fast actuation with nanoprecision over a large range has been a challenge in advanced intelligent manufacturing like lithography mask aligner. Traditional stacked stage method works effectively only in a local, limited range, and vibration coupling is also challenging. Here, we design a dual mechanism multimodal linear actuator (DMMLA) consisted of piezoelectric and electromagnetic costator and coslider for producing macro-, micro-, and nanomotion, respectively. A DMMLA prototype is fabricated, and each working mode is validated separately, confirming its fast motion (0~50 mm/s) in macromotion mode, micromotion (0~135 μm/s) and nanomotion (minimum step: 0~2 nm) in piezoelectric step and servomotion modes. The proposed dual mechanism design and multimodal motion method pave the way for next generation high-precision actuator development.
