Removal Modeling and Experimental Verification of Magnetorheological Polishing Fused Silica Glass
Limin Zhang,
Weixing Li,
Jiakang Zhou,
Mingming Lu,
Qiang Liu,
Yongsheng Du,
Yakun Yang
Affiliations
Limin Zhang
Jilin Provincial International Cooperation Key Laboratory for High-Performance Manufacturing and Testing, School of Mechatronic Engineering, Changchun University of Technology, Changchun 130012, China
Weixing Li
Jilin Provincial International Cooperation Key Laboratory for High-Performance Manufacturing and Testing, School of Mechatronic Engineering, Changchun University of Technology, Changchun 130012, China
Jiakang Zhou
School of Machinery and Automation, Weifang University, Weifang 261061, China
Mingming Lu
Jilin Provincial International Cooperation Key Laboratory for High-Performance Manufacturing and Testing, School of Mechatronic Engineering, Changchun University of Technology, Changchun 130012, China
Qiang Liu
Key Laboratory of CNC Equipment Reliability, Ministry of Education, Jilin University, Changchun 130012, China
Yongsheng Du
Jilin Provincial International Cooperation Key Laboratory for High-Performance Manufacturing and Testing, School of Mechatronic Engineering, Changchun University of Technology, Changchun 130012, China
Yakun Yang
Jilin Provincial International Cooperation Key Laboratory for High-Performance Manufacturing and Testing, School of Mechatronic Engineering, Changchun University of Technology, Changchun 130012, China
Compared to conventional polishing methods, magnetorheological polishing has no subsurface damage and a has good polishing effect, which is suitable for fused silica glass surface processing. However, the existing magnetorheological polishing material removal model has low processing efficiency and uneven removal, which cannot realize the deterministic processing of parts. The material removal (MR) model of fused silica glass is established by convolving the dwell time with the material removal function. The residence time is Fourier transformed. The consequence of process variable such as machining time, workpiece rotational frequency, machining gap and X-direction deflection on the MR of workpiece interface are analyzed. Experiments verify the validity of the material removal model. The surface precision PV value of the workpiece surface under the optimal process parameters was decreased from 7.959 nm to 0.609 nm for machining. The experiment results indicate that the established MR model can be implemented as the deterministic MR of the optical surface and ameliorate the surface accuracy of the workpiece surface.