PLASMA FILTERS IN TECHNIQUE OF THE VACUUM-ARC COMPOSITE COATING DEPOSITION

Abstract

The brief survey of devices for micro- and nanostructured composite coatings formation by deposition from a filtered cathodic arc plasma is given. The main attention is paid on the features specifying that how uniform is thickness and composition distribution of the coating deposited by use of those devices. Analysis of the publications showed that in respect of ability to obtain uniform coatings the wide-aperture single- and two-channel systems with acute-angled or “specular” magnetic fields are the most perspective. The setup which have been tasted rigidly in industrial conditions, and designed efficient setups equipped with the said systems are described as examples.