Improvement of spatial resolution by tilt correction in near-field scanning microwave microscopy
Xianfeng Zhang,
Zhe Wu,
Quansong Lan,
Zhiliao Du,
Quanxin Zhou,
Ruirui Jiang,
Jianlong Liu,
Yubin Gong,
Baoqing Zeng
Affiliations
Xianfeng Zhang
School of Physics, University of Electronic Science and Technology of China, Chengdu 611731, China
Zhe Wu
School of Physics, University of Electronic Science and Technology of China, Chengdu 611731, China
Quansong Lan
School of Physics, University of Electronic Science and Technology of China, Chengdu 611731, China
Zhiliao Du
School of Physics, University of Electronic Science and Technology of China, Chengdu 611731, China
Quanxin Zhou
School of Physics, University of Electronic Science and Technology of China, Chengdu 611731, China
Ruirui Jiang
School of Electronics Science and Engineering National Exemplary School of Microelectronics, University of Electronic Science and Technology of China, Chengdu 611731, China
Jianlong Liu
School of Electronics Science and Engineering National Exemplary School of Microelectronics, University of Electronic Science and Technology of China, Chengdu 611731, China
Yubin Gong
School of Electronics Science and Engineering National Exemplary School of Microelectronics, University of Electronic Science and Technology of China, Chengdu 611731, China
Baoqing Zeng
School of Electronics Science and Engineering National Exemplary School of Microelectronics, University of Electronic Science and Technology of China, Chengdu 611731, China
The limitation of mechanical manufacturing will result in a small tilt angle of the sample stage in the horizontal direction, which decreases the spatial resolution of imaging in near-field scanning microwave microscopy (NSMM). In this paper, we focus on the tilt correction and improve the spatial resolution of the NSMM image. The results of electromagnetic simulation and line scan measurement demonstrate the critical parameters affecting the sensitivity of NSMM, such as the length of the probe extending out of the cavity, the tip–sample distance, and the tip apex size. The tilt images can rotate successfully to the horizontal plane with the tilt correction methods, and the local average and re-interpolation are applied to denoise the images. Experimental NSMM images of copper thin film grid, coin texture, lithography mask, and leaf vein are obtained. The images before and after correction verify the improvement of the spatial resolution with all the above methods.
