Coupling Supramolecular Assemblies and Reactive Oxygen Species (ROS) with Megasonic Action for Applications in Shallow Trench Isolation (STI) Post-Chemical Mechanical Planarization (p-CMP) Cleaning

• Katherine M. Wortman-Otto,
• Don Watson,
• Don Dussault,
• Jason J. Keleher

Affiliations

Katherine M. Wortman-Otto

Department of Chemistry, Lewis University, Romeoville, Illinois, United States

Don Watson

ProSys Megasonics, ProSys Inc., Campbell, California, United States

Don Dussault

ProSys Megasonics, ProSys Inc., Campbell, California, United States

Jason J. Keleher

Department of Chemistry, Lewis University, Romeoville, Illinois, United States