Kilohertz Pixel-Rate Multilayer Terahertz Imaging of Subwavelength Coatings

Abstract

The acquisition speed of terahertz time-domain spectroscopy systems has undergone a significant improvement in recent years. With the development of dual-laser-based sampling techniques such as ASOPS or ECOPS, waveform acquisition rates in the kilohertz range have become feasible. Here, we present measurements of sub-wavelength layers in multilayer systems at a rate of 1.6 kHz, where the individual layer thicknesses are analyzed in real time. For demonstration, we image layers on metallic and non-metallic disks with a 300 mm diameter, acquiring 240,000 pixels in only 2.5 min. By combining a rotation of the samples with a linear translation of the measurement head, we maximize the measurement yield. Owing to a “single-shot” (625 µs) dynamic range of 40 dB and a bandwidth above 3 THz of the ECOPS system, we achieve sub-micron repeatability for each layer.

Keywords

• terahertz
• layer thickness measurement
• ECOPS
• optical sampling
• ultrafast terahertz measurements
• terahertz imaging