Improving the calibration of phase measuring deflectometry by a polynomial representation of the display shape

Abstract

Abstract Background Phase measuring deflectometry is a highly precise and full field metrology technique for specular surfaces based on the distortion of known reference patterns observed as a reflection at the surface under test. Typically, liquid crystal displays are employed to provide the required patterns. Due to a lack of research, these displays are used without sufficient calibration. Methods In this work, we present an enhanced calibration for phase measuring deflectometry, taking flatness deviations of the display surface into account. The display shape is modelled as a polynomial surface whose coefficients are determined by minimizing the retrace error in a global optimization procedure during calibration. This approach does not require any additional measurements or hardware. Improvements due to the enhanced calibration model are qualified experimentally using a flat and a spherical concave mirror. Results and conclusion The model-based parameterization of the display surface yields significant improvement on both samples. The peak to valley (PV) of measured deviations on the plane mirror are reduced by 67% to 0.55 μm. Measuring the spherical sample without the display parameterization leads to a rather large shape deviation of 33.40 μm PV which is reduced by 94% to 1.98 μm. The viability of our approach confirms the dominant role of flatness deviations of the display surface as an error source in absolute shape measurement using phase measuring deflectometry.

Keywords

• Deflectometry
• Absolute surface metrology
• Displays