Beilstein Journal of Nanotechnology (Mar 2017)

Vapor deposition routes to conformal polymer thin films

  • Priya Moni,
  • Ahmed Al-Obeidi,
  • Karen K. Gleason

DOI
https://doi.org/10.3762/bjnano.8.76
Journal volume & issue
Vol. 8, no. 1
pp. 723 – 735

Abstract

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Vapor phase syntheses, including parylene chemical vapor deposition (CVD) and initiated CVD, enable the deposition of conformal polymer thin films to benefit a diverse array of applications. This short review for nanotechnologists, including those new to vapor deposition methods, covers the basic theory in designing a conformal polymer film vapor deposition, sample preparation and imaging techniques to assess film conformality, and several applications that have benefited from vapor deposited, conformal polymer thin films.

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