Electrostatically actuated microelectromechanical system (MEMS) switches with fixed- fixed beams were fabricated. FEM modeling was used to calculate the contributions of stress in the fabricated beams from the measured values of pull-in voltage. The reported study provides useful guidelines to optimize the design of fixed-fixed beams, in order to reduce the stress contributions for the successful development of efficient and reliable electrostatically actuated MEMS devices.
