Study on Dynamic Characteristics of Aerostatic Bearing with Elastic Equalizing Pressure Groove

Abstract

Microvibration has an important influence on the dynamic performance of aerostatic bearings. Dynamic stiffness and equivalent damping coefficient are the main indexes to evaluate the dynamic characteristics of the aerostatic bearing. In order to study the dynamic characteristics of a new type of aerostatic bearing with the elastic equalizing pressure groove (EEPG), the dynamic characteristics of the new type of bearing are studied by theoretical calculation and experiment. First, the dynamic gas-solid coupling control equation is established. Then, the steady term and the perturbation term are decomposed by the perturbation method. By solving the coupling model, the dynamic characteristics of the bearing are calculated and analyzed. The calculation results show that the perturbation frequency has a significant effect on the dynamic stiffness and equivalent damping coefficient of the aerostatic bearing with EEPG. The dynamic stiffness increases with the increase of frequency, and the equivalent damping coefficient decreases with the increase of frequency. The experimental results are basically the same with the theoretical results, which effectively verify the correctness of the theoretical analysis.