Fabrication and piezoresistance of high temperature ITO thin film strain gauge

YANG Shen-yong; ZHANG Cong-chun; YANG Zhuo-qing; LI Hong-fang; YAO Jin-yuan; HUANG Man-guo; WANG Hong; DING Gui-fu

doi:10.11868/j.issn.1001-4381.2018.000875

Cailiao gongcheng (Apr 2020)

Fabrication and piezoresistance of high temperature ITO thin film strain gauge

YANG Shen-yong,
ZHANG Cong-chun,
YANG Zhuo-qing,
LI Hong-fang,
YAO Jin-yuan,
HUANG Man-guo,
WANG Hong,
DING Gui-fu

Affiliations

YANG Shen-yong: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China;
ZHANG Cong-chun: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China;
YANG Zhuo-qing: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China;
LI Hong-fang: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China;
YAO Jin-yuan: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China;
HUANG Man-guo: AVIC Beijing Changcheng Aeronautical Measurement and Control Technology Research Institute, Beijing 101111, China
WANG Hong: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China;
DING Gui-fu: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai 200240, China;

DOI: https://doi.org/10.11868/j.issn.1001-4381.2018.000875
Journal volume & issue: Vol. 48, no. 4
pp. 145 – 150

Abstract

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High temperature thin film strain gauges are widely used in the strain measurement of extreme conditions, especially in the high temperature components. ITO thin film strain gauges can generally be applied to the strain measurements above 1000℃. ITO high temperature thin film strain gauge was fabricated on the ceramic substrate using magnetron sputtering, and then was thermal treated at high temperature in pure N2 atmosphere, with the purpose of studying its microstructure, XPS, temperature resistance characteristics and piezoresistive response. The results show that the temperature coefficient of resistance (TCR) of ITO thin film strain gauge can stabilize at -750×10-6℃-1. In addition, ITO thin film strain gauge is loaded at 1200℃, and the results show that the drift rate is 0.0018 h-1 and the strain factor is 16. Stable TCR and low drift rate of ITO thin film strain gauge provide the possibility for its application in the strain measurement of the hot end components.

Published in Cailiao gongcheng

ISSN: 1001-4381 (Print)
Publisher: Journal of Materials Engineering
Country of publisher: China
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
Website: http://jme.biam.ac.cn/CN/1001-4381/home.shtml

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