Fabrication of SnO₂ Flexible Sensor by Inkjet Printing Technology

Abstract

In this work, a flexible tin oxide (SnO2) gas sensor was successfully fabricated by inkjet printing technology. This thin film deposition technique requires the formulation of stable suspensions with specific fluidic properties. Aqueous Sol-gel method was applied to synthesize a stable sol based on tin oxide, then transformed into ink with the appropriate viscosity and surface tension to be printed using a drop-on-demand piezoelectric inkjet printer. Thermal analyses of synthetized sol show that a crystallized structure of SnO2 could be obtained at 350 °C, which is lower than crystallization temperatures of SnO2 previously reported in the literature, and entirely consistent with our plastic substrate. The printed thin-film was then sintered at 350 °C on polyimide foil (Upilex-50S) and characterized as sensor.

Keywords

• flexible gas sensor
• SnO2 ink preparation
• sol-gel process
• inkjet printing