A DEVELOPMENT OF SPRAY-PYROLYSIS TECHNOLOGY FOR SYNTHESIS OF TRANSPARENT CONDUCTIVE COATINGS BASED ON TIN DIOXIDE

Abstract

Background. The advantages of the spray-pyrolysis method are the ability to produce films with a high area and a high degree of uniformity at acceptable (from 100 to 500 °C) process temperatures. The method does not require the use of vacuum at all stages of the process. The aim of the study is to select the optimal technological parameters for obtaining transparent conductive coatings based on tin dioxide with minimal surface resistance. Materials and methods. Such technological stages of the process of obtaining samples of transparent conducting oxides based on tin dioxide are presented in the research as preparation of the surface of glass substrates; preparation of precursor solutions; deposition of pure and antimony-doped films of tin dioxide on the surface of substrates. Results. A method for the synthesis of transparent conducting oxides samples based on tin dioxide by the spray-pyrolysis method was developed, and the optimal values of technological parameters aimed at achieving the minimum surface resistance of samples with a SnO2 coating were established empirically. Conclusions. The proposed technological modes make it possible to synthesize by spray pyrolysis transparent conducting oxides based on tin dioxide with a surface resistance RS = 27 Ohm/□, which corresponds to the modern world level of industrially produced transparent conducting coatings based on tin-doped indium oxide. The results obtained confirm the feasibility of manufacturing transparent conductive coatings based on tin dioxide by spray-pyrolysis.

Keywords

• spray-pyrolysis
• tin dioxide
• precursor
• transparent conductive oxide
• surface resistance