Tehnika (Jan 2014)

Ellipsometry data analysis and ellipsometric spectra of complex materials

  • Stojanović Danka B.,
  • Radovanović Jelena V.,
  • Milanović Vitomir B.,
  • Rakočević Zlatko Lj.

DOI
https://doi.org/10.5937/tehnika1402185S
Journal volume & issue
Vol. 69, no. 2
pp. 185 – 189

Abstract

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Optical and structural properties of materials can be characterized by spectroscopic ellipsometry which represents an experimental technique that measures polarized light reflected from a material surface. Since the most complicated part of this method is data analysis and modeling, we present the calculation of the ellipsometric parameters for bi-isotropic materials. We consider the ellipsometric model for these materials which require not just permittivity like in conventional model, but also magnetic permeability and magneto electric coupling.

Keywords