Fabrication and characterization of annular magnetic nanostructures

Abstract

Large arrays of permalloy (Ni81Fe19) annular structures were fabricated using a self-aligned patterning process based on ion-beam proximity lithography (IBPL), where a broad beam of energetic He ions is shaped into billions of ion beamlet by a stencil mask to pattern electron beam sensitive resist. IBPL was used to form an array of circular openings in poly(methyl methacrylate) (PMMA) resist, followed by a tone reversal process to form circular pillars in an underlying polymethylglutarimide (PMGI) layer. The PMGI pillars were conformally coated with silicon oxide, which was followed by anisotropic reactive ion etch (RIE) to form silicon oxide rings, which were transferred into the underlying sputter deposited permalloy thin film by ion milling. This fabrication approach was used to make 6 x 6 mm2 arrays of rings on a constant pitch of 670 nm with the outer diameters varied between 350 nm and 450 nm with a fixed inner diameter of 150 nm. Three unique samples that were fabricated and characterized using a vibrating sample magnetometer. The measured M-H loops showed the switching from an onion to a vortex and back to an onion state and are in good agreement with micromagnetic simulations and previously published data.