Coatings (2020-09-01)

Comparison of Carbon Thin Films with Low Secondary Electron Yield Deposited in Neon and Argon

  • Yuxin Zhang,
  • Yigang Wang,
  • Sihui Wang,
  • Wei Wei,
  • Xiaoqin Ge,
  • Bangle Zhu,
  • Jieqiong Shao,
  • Yong Wang

DOI
https://doi.org/10.3390/coatings10090884
Journal volume & issue
Vol. 10, no. 884
p. 884

Abstract

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Modification of vacuum chamber surface properties by introducing a layer of material with low secondary electron yield (SEY) is one of the most useful solutions to suppress the electron-cloud in high-energy particle accelerators. In the present work, amorphous carbon thin films have been produced by DC magnetron sputtering with Neon and Argon sputtering gases. Microstructures of the thin films have been characterized by using scanning electron microscopy (SEM) and atomic force microscopy (AFM). The sp2 and sp3 hybridized carbon atoms are evaluated using X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. The amorphous carbon coatings comprise tiny granularities of tens of nanometers. The amorphous carbon films show more graphite-like properties as revealed by XPS and Raman spectroscopy. The secondary electron emission measurement results indicate that amorphous carbon coatings present SEY of 2 hybridization content, leading to a slightly lower SEY compared with the film produced with Ar.

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