Chip-scale optical airflow sensor

Abstract

Abstract Airflow sensors are an essential component in a wide range of industrial, biomedical, and environmental applications. The development of compact devices with a fast response and wide measurement range capable of in situ airflow monitoring is highly desirable. Herein, we report a miniaturized optical airflow sensor based on a GaN chip with a flexible PDMS membrane. The compact GaN chip is responsible for light emission and photodetection. The PDMS membrane fabricated using a droplet-based molding process can effectively transform the airflow stimuli into optical reflectance changes that can be monitored by an on-chip photodetector. Without the use of external components for light coupling, the proposed sensor adopting the novel integration scheme is capable of detecting airflow rates of up to 53.5 ms−1 and exhibits a fast response time of 12 ms, holding great promise for diverse practical applications. The potential use in monitoring human breathing is also demonstrated.