Nanophotonics (Mar 2023)

Defining the zerogap: cracking along the photolithographically defined Au–Cu–Au lines with sub-nanometer precision

  • Kim Sunghwan,
  • Das Bamadev,
  • Ji Kang Hyeon,
  • Moghaddam Mahsa Haddadi,
  • Chen Cheng,
  • Cha Jongjin,
  • Namgung Seon,
  • Lee Dukhyung,
  • Kim Dai-Sik

DOI
https://doi.org/10.1515/nanoph-2022-0680
Journal volume & issue
Vol. 12, no. 8
pp. 1481 – 1489

Abstract

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Cracks are formed along the photolithographically pre-determined lines with extremely high yield and repeatability, when Cu clusters are introduced between planarized Au thin films sequentially deposited on a PET substrate. These clusters act as nanometer-sized spacers preventing the formation of contiguous metallic bond between the adjacent Au layers which will render prepatterned-cracking impossible. While the effective gap width is initially zero in the optical sense from microwaves all the way to the visible, outer-bending the PET substrate allows the gap width tuning into the 100 nm range, with the stability and controllability in the ranges of 100 s and Angstrom-scale, respectively. It is anticipated that our wafer-scale prepatterned crack technology with an unprecedented mixture of macroscopic length and Angstrom-scale controllability will open-up many applications in optoelectronics, quantum photonics and photocatalysis.

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