Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level
Yassir Arezki,
Rong Su,
Ville Heikkinen,
François Leprete,
Pavel Posta,
Youichi Bitou,
Christian Schober,
Charyar Mehdi-Souzani,
Bandar Abdulrahman Mohammed Alzahrani,
Xiangchao Zhang,
Yohan Kondo,
Christof Pruss,
Vit Ledl,
Nabil Anwer,
Mohamed Lamjed Bouazizi,
Richard Leach,
Hichem Nouira
Affiliations
Yassir Arezki
Laboratoire Commun de Métrologie (LCM), Laboratoire National de Métrologie et d’Essais (LNE), 1 Rue Gaston Boissier, 75015 Paris, France
Rong Su
Manufacturing Metrology Team, Faculty of Engineering, University of Nottingham (UNOTT), Nottingham NG8 1BB, UK
Ville Heikkinen
VTT Technical Research Centre of Finland Ltd., Centre for Metrology MIKES, Tekniikantie 1, 02150 Espoo, Finland
François Leprete
THALES LAS France, Etablissement de Saint Heand, Boulevard Ravel de Malval, 42570 Saint Heand, France
Pavel Posta
TOPTEC, Institute of Plasma Physics of the Czech Academy of Sciences, Za Slovankou 1782/3, 182 00 Praha, Czech Republic
Youichi Bitou
National Institute of Advanced Industrial Science and Technology (AIST), National Metrology Institute of Japan (NMIJ), Tsukuba, Ibaraki 305-8563, Japan
Christian Schober
Institute of Applied Optics (ITO), University Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany
Charyar Mehdi-Souzani
Université Paris-Saclay, Université Sorbonne Paris Nord, ENS Paris-Saclay, LURPA, 91190 Gif-sur-Yvette, France
Bandar Abdulrahman Mohammed Alzahrani
Department of Mechanical Engineering, College of Engineering, Prince Sattam bin Abdulaziz University (PSAU), Alkharj 16273, Saudi Arabia
Xiangchao Zhang
Shanghai Engineering Centre of Ultra-Precision Optical Manufacturing, Fudan University, Shanghai 200438, China
Yohan Kondo
National Institute of Advanced Industrial Science and Technology (AIST), National Metrology Institute of Japan (NMIJ), Tsukuba, Ibaraki 305-8563, Japan
Christof Pruss
Institute of Applied Optics (ITO), University Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany
Vit Ledl
TOPTEC, Institute of Plasma Physics of the Czech Academy of Sciences, Za Slovankou 1782/3, 182 00 Praha, Czech Republic
Nabil Anwer
Université Paris-Saclay, Université Sorbonne Paris Nord, ENS Paris-Saclay, LURPA, 91190 Gif-sur-Yvette, France
Mohamed Lamjed Bouazizi
Department of Mechanical Engineering, College of Engineering, Prince Sattam bin Abdulaziz University (PSAU), Alkharj 16273, Saudi Arabia
Richard Leach
Manufacturing Metrology Team, Faculty of Engineering, University of Nottingham (UNOTT), Nottingham NG8 1BB, UK
Hichem Nouira
Laboratoire Commun de Métrologie (LCM), Laboratoire National de Métrologie et d’Essais (LNE), 1 Rue Gaston Boissier, 75015 Paris, France
The design of innovative reference aspheric and freeform optical elements was investigated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the values of form error. Agreement among the results of several partners was observed, which demonstrates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.
