Atomic Layer Deposition of ScF3 and ScxAlyFz Thin Films

• Elisa Atosuo,
• Mikko J. Heikkilä,
• Johanna Majlund,
• Leevi Pesonen,
• Miia Mäntymäki,
• Kenichiro Mizohata,
• Markku Leskelä,
• Mikko Ritala

Affiliations

Elisa Atosuo

Department of Chemistry, University of Helsinki, Helsinki, Finland

Mikko J. Heikkilä

Department of Chemistry, University of Helsinki, Helsinki, Finland

Johanna Majlund

Department of Chemistry, University of Helsinki, Helsinki, Finland

Leevi Pesonen

Department of Chemistry, University of Helsinki, Helsinki, Finland

Miia Mäntymäki

Department of Chemistry, University of Helsinki, Helsinki, Finland

Kenichiro Mizohata

Department of Physics, University of Helsinki, Helsinki, Finland

Markku Leskelä

Department of Chemistry, University of Helsinki, Helsinki, Finland

Mikko Ritala

Department of Chemistry, University of Helsinki, Helsinki, Finland