Performance-Enhanced Piezoelectric Micromachined Ultrasonic Transducers by PDMS Acoustic Lens Design
Licheng Jia,
Yong Liang,
Fansheng Meng,
Guojun Zhang,
Renxin Wang,
Changde He,
Yuhua Yang,
Jiangong Cui,
Wendong Zhang,
Guoqiang Wu
Affiliations
Licheng Jia
Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Taiyuan 030051, China
Yong Liang
Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Taiyuan 030051, China
Fansheng Meng
Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Taiyuan 030051, China
Guojun Zhang
Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Taiyuan 030051, China
Renxin Wang
Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Taiyuan 030051, China
Changde He
Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Taiyuan 030051, China
Yuhua Yang
Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Taiyuan 030051, China
Jiangong Cui
Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Taiyuan 030051, China
Wendong Zhang
Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Taiyuan 030051, China
Guoqiang Wu
Hubei Key Laboratory of Electronic Manufacturing and Packaging Integration, Institute of Technological Sciences and the School of Microelectronics, Wuhan University, Wuhan 430072, China
This paper delves into enhancing the performance of ScAlN-based Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) through the implementation of Polydimethylsiloxane (PDMS) acoustic lenses. The PMUT, encapsulated in PDMS, underwent thorough characterization through the utilization of an industry-standard hydrophone calibration instrument. The experimental results showed that the ScAlN-based PMUT with the PDMS lenses achieved an impressive sensitivity of −160 dB (re: 1 V/μPa), an improvement of more than 8 dB compared to the PMUT with an equivalent PDMS film. There was a noticeable improvement in the −3 dB main lobe width within the frequency response when comparing the PMUT with PDMS encapsulation, both with and without lenses. The successful fabrication of high-performance PDMS lenses proved instrumental in significantly boosting the sensitivity of the PMUT. Comprehensive performance evaluations underscored that the designed PMUT in this investigation surpassed its counterparts reported in the literature and commercially available transducers. This encouraging outcome emphasizes its substantial potential for commercial applications.
