AIP Advances (Oct 2018)

Facile process to clean PMMA residue on graphene using KrF laser annealing

  • Hyeon Jun Hwang,
  • Yongsu Lee,
  • Chunhum Cho,
  • Byoung Hun Lee

DOI
https://doi.org/10.1063/1.5051671
Journal volume & issue
Vol. 8, no. 10
pp. 105326 – 105326-6

Abstract

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Persistent PMMA residue formed during a graphene transfer has been a culprit in the optimization of graphene device performance. We demonstrated a facile process to remove the PMMA residue using pulsed KrF laser annealing system at H2/Ar ambient. 10min laser annealing at 248nm could remove the PMMA residue as well as the methoxy and carboxyl function groups without causing noticeable damage to the graphene.