Preface: Materials, metrology, and modeling for a future beyond CMOS technology

• G. Andrew Antonelli,
• Dann Herr,
• Sean W. King

Affiliations

G. Andrew Antonelli

Nanometrics, Hillsboro, Oregon 97124, USA

Dann Herr

School of Nanoscience and Nanoengineering, University of North Carolina Greensboro, Greensboro, North Carolina 27401, USA

Sean W. King

Nanometrics, Hillsboro, Oregon 97124, USA