APL Materials
(May 2018)
Preface: Materials, metrology, and modeling for a future beyond CMOS technology
- G. Andrew Antonelli,
- Dann Herr,
- Sean W. King
Affiliations
- G. Andrew Antonelli
- Nanometrics, Hillsboro, Oregon 97124, USA
- Dann Herr
- School of Nanoscience and Nanoengineering, University of North Carolina Greensboro, Greensboro, North Carolina 27401, USA
- Sean W. King
- Nanometrics, Hillsboro, Oregon 97124, USA
- DOI
-
https://doi.org/10.1063/1.5037331
- Journal volume & issue
-
Vol. 6,
no. 5
pp.
058001
– 058001-2
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